Senior Lithography Engineer (Ottawa)

Priority may be given to the following designated employment equity groups: women, Indigenous Peoples* (First Nations, Inuit and Métis), persons with disabilities and racialized persons*. The Employment Equity Act, which is under review, uses the terminology Aboriginal peoples and visible minorities. The role We are looking for a Senior Lithography Engineer to support our Canadian Photonics Fabrication Centre (CPFC) Research Centre.

The incumbent will work full‑time on the NRC work location, focusing on process systems located in the CPFC and will lead process development and sustaining activities for ASML steppers and mask aligner lithography systems during the evening shift. Responsibilities Develop and optimise photolithography processes. Lead projects with product engineers to develop and optimise new processes and resolve process marginalities.

Establish validation and verification criteria for new processes and products to address new client/project needs and identify opportunities for process improvements. Work with clients, partners and CAD engineers to define design rules, fab metrology structures, parametric test structures and product mask sets. Create and revise technical documentation, provide reports to clients, and support maintenance activities related to patterning equipment and manufacturing processes.

Screening criteria Education Bachelor’s degree in the Physical, Chemical or Materials Sciences or another engineering discipline. A PhD in one of these disciplines will be considered an asset. Experience Extensive and recent hands‑on experience in semiconductor manufacturing/production environments, including lithography process development/improvement, troubleshooting, and leading/managing client technical and/or research projects.

Extensive and recent hands‑on experience with semiconductor lithography tools, including ASML steppers, mask aligners, and track systems, with demonstrated ownership of process development, optimisation, and tool sustainment. Significant experience with III‑V semiconductor platforms (e.g., InP), including cleanroom processing and device fabrication flows, and process integration, for opto‑electronic devices. Significant experience in SPC, DoE, and MES, applied to process control, monitoring, and yield improvement.

Significant experience managing technical partnerships, client relationships, contracts, or project deliverables. Significant experience leading the transfer, qualification, and release of lithography processes to production, including documentation, process control definition, and ensuring readiness for stable manufacturing. Significant experience is defined as experience of three (3) to five (5) years.

Extensive experience is defined as experience of eight (8) years or more. Condition of employment Reliability Status: Verification of background information over a period of 5 years is required. Must qualify to work in a controlled Goods Zone; training will be provided.

Language requirement: English. Assessment criteria Technical competencies Advanced knowledge in photolithography processes (coating, exposure, development) and process troubleshooting in a production environment. Advanced knowledge in the qualification, operation, and sustainment of lithography equipment, including ASML steppers, coat/develop tracks, and mask aligners.

Demonstrated ability to integrate lithography within semiconductor fabrication flows, including interaction with etch, deposition, and metrology processes. Advanced knowledge of SPC and DoE, and ability to apply them to process optimisation, variability reduction and yield improvement. Solid knowledge of process improvement, sustaining engineering, and management of technical or research projects to support stable manufacturing performance and client/project objectives.

Solid knowledge and application of cleanroom safety practices and safe handling of chemicals, gases, and fabrication equipment. Behavioural competencies Research – Communication (Level 3) Research – Creative thinking (Level 3) Research – Partnering (Level 2) Research – Results orientation (Level 2) Research – Teamwork (Level 2) Compensation and benefits The intent of this hiring action is to staff this position at the RCO‑4 level with a salary range of $143,127 to $168,192. Salary determination will be based on a review of the candidate’s expertise, outcomes and impacts of their previous work experience relative to the requirements of the level.

NRC employees enjoy a robust pension plan, comprehensive health and dental coverage, disability and life insurance, office closure at the end of December, and additional supports to enhance well‑being throughout the career. Notes Relocation assistance will be determined in accordance with the NRC's directives. A pre‑qualified list may be established for similar positions for a one‑year period.

Preference will be given to Canadian Citizens and Permanent Residents of Canada. Citizenship information is required in the application. This position requires work on the evening shift.

The incumbent must adhere to safe workplace practices at all times. The incumbent is expected to work in a clean room laboratory environment and follow established health and safety guidelines. Willingness to work with hazardous materials and/or situations.

Closing Date: 16 June 2026 – 23:59 Eastern Time. #J-18808-Ljbffr